Inventor
PARK MYEONG-HO
KR6 patents
Patents
6 patentsUS10131680B1Nov 20, 2018
Group 4 metal element-containing alkoxy compound, preparing method thereof, precursor composition including the same for film deposition, and method of depositing film using the same
UP CHEMICAL CO LTD3 citations70
US11485749B2Nov 1, 2022
Group 4 metal element-containing compounds, method of preparing the same, precursor compositions including the same for forming a film, and method of forming a film using the same
UP CHEMICAL CO LTD1 citations60
US9255324B2Feb 9, 2016
Aluminum precursor composition
UP CHEMICAL CO LTD2 citations60
US12522921B2Jan 13, 2026
Yttrium/lanthanide metal precursor compound, composition for forming film including the same, and method of forming yttrium/lanthanide metal-containing film using the same
UP CHEMICAL CO LTD0 citations54
US10577385B2Mar 3, 2020
Group 5 metal compound, method for preparing the same, precursor composition for depositing layer containing the same, and method for depositing layer using the same
UP CHEMICAL CO LTD0 citations49
US10005795B1Jun 26, 2018
Group 4 metal element-containing compound, method of preparing the same, precursor composition including the same for depositing film, and method of depositing film using the same
UP CHEMICAL CO LTD1 citations49