P

Inventor

AIKAWA KATSUYOSHI

JP10 patents
⚠️ This page may combine multiple inventors who share the name “AIKAWA KATSUYOSHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TOKYO ELECTRON LTD

6 patents
US10072336B2Sep 11, 2018

Film forming apparatus, film forming method, and recording medium

TOKYO ELECTRON LTD5 citations72
US9404184B2Aug 2, 2016

Substrate position detecting apparatus, substrate processing apparatus using substrate position detecting apparatus, and deposition apparatus

TOKYO ELECTRON LTD4 citations71
US11085113B2Aug 10, 2021

Film forming method and recording medium

TOKYO ELECTRON LTD0 citations62
US10683573B2Jun 16, 2020

Film forming apparatus

TOKYO ELECTRON LTD1 citations62
US12394656B2Aug 19, 2025

Mounting table and substrate processing apparatus

TOKYO ELECTRON LTD0 citations60
US10428425B2Oct 1, 2019

Film deposition apparatus, method of depositing film, and non-transitory computer-readable recording medium

TOKYO ELECTRON LTD0 citations41

TAISHO PHARMACEUTICAL CO LTD

2 patents
US6210698B1Apr 3, 2001

Suppository composition

TAISHO PHARMACEUTICAL CO LTD24 citations87
US7022335B2Apr 4, 2006

Suppository of retaining in lower region of rectum

TAISHO PHARMACEUTICAL CO LTD3 citations58

MATSUURA HIROYUKI

1 patent
US8394200B2Mar 12, 2013

Vertical plasma processing apparatus for semiconductor process

MATSUURA HIROYUKI10 citations83

AIKAWA KATSUYOSHI

1 patent
US8854449B2Oct 7, 2014

Substrate position detection apparatus, film deposition apparatus equipped with the same, and substrate position detection method

AIKAWA KATSUYOSHI14 citations79