Inventor
NAKATSUBO TOSHIYUKI
JP4 patents
Patents
4 patentsUS11664201B2May 30, 2023
Substrate holding mechanism and substrate processing apparatus
TOKYO ELECTRON LTD0 citations49
US11136669B2Oct 5, 2021
Film formation apparatus
TOKYO ELECTRON LTD0 citations49
US11118267B2Sep 14, 2021
Substrate processing method
TOKYO ELECTRON LTD0 citations49
US9601318B2Mar 21, 2017
Plasma processing method and plasma processing apparatus
TOKYO ELECTRON LTD0 citations40