Inventor
HARIHARAPUTHIRAN MARIAPPAN
US5 patents
Patents
5 patentsUS9735154B2Aug 15, 2017
Semiconductor structure having gap fill dielectric layer disposed between fins
GLOBALFOUNDRIES INC9 citations83
US9105478B2Aug 11, 2015
Devices and methods of forming fins at tight fin pitches
GLOBALFOUNDRIES INC9 citations83
US9608086B2Mar 28, 2017
Metal gate structure and method of formation
GLOBALFOUNDRIES INC8 citations79
US9196499B2Nov 24, 2015
Method of forming semiconductor fins
GLOBALFOUNDRIES INC3 citations61
US9147696B2Sep 29, 2015
Devices and methods of forming finFETs with self aligned fin formation
GLOBALFOUNDRIES INC2 citations61