Inventor
CHANG YUNGSHAN
US8 patents
Patents
8 patentsUS9834433B2Dec 5, 2017
Piezoelectric optical MEMS device with embedded moisture layers
TEXAS INSTRUMENTS INC2 citations70
US11148939B2Oct 19, 2021
Stress compensation for piezoelectric optical MEMS devices
TEXAS INSTRUMENTS INC0 citations56
US10829365B2Nov 10, 2020
Piezoelectric optical MEMS device with embedded moisture layers
TEXAS INSTRUMENTS INC0 citations49
US10319899B2Jun 11, 2019
Method of forming a semiconductor device
TEXAS INSTRUMENTS INC0 citations48
US9755139B2Sep 5, 2017
Piezoeletric wet etch process with reduced resist lifting and controlled undercut
TEXAS INSTRUMENTS INC0 citations48
US9939710B2Apr 10, 2018
High-temperature isotropic plasma etching process to prevent electrical shorts
TEXAS INSTRUMENTS INC0 citations47
US9405089B2Aug 2, 2016
High-temperature isotropic plasma etching process to prevent electrical shorts
TEXAS INSTRUMENTS INC0 citations47
US9890040B2Feb 13, 2018
Stress compensation for piezoelectric optical MEMS devices
TEXAS INSTRUMENTS INC0 citations46