Inventor
DENG YUJUN
US16 patents
⚠️ This page may combine multiple inventors who share the name “DENG YUJUN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
KLA TENCOR CORP
14 patentsUS8929406B2Jan 6, 2015
193NM laser and inspection system
KLA TENCOR CORP63 citations98
US9529182B2Dec 27, 2016
193nm laser and inspection system
KLA TENCOR CORP33 citations94
US9151940B2Oct 6, 2015
Semiconductor inspection and metrology system using laser pulse multiplier
KLA TENCOR CORP32 citations93
US9804101B2Oct 31, 2017
System and method for reducing the bandwidth of a laser and an inspection system and method using a laser
KLA TENCOR CORP8 citations84
US9748729B2Aug 29, 2017
183NM laser and inspection system
KLA TENCOR CORP14 citations84
US9318869B2Apr 19, 2016
193nm laser and inspection system
KLA TENCOR CORP11 citations84
US9525265B2Dec 20, 2016
Laser repetition rate multiplier and flat-top beam profile generators using mirrors and/or prisms
KLA TENCOR CORP6 citations83
US10199149B2Feb 5, 2019
183NM laser and inspection system
KLA TENCOR CORP2 citations73
US9419407B2Aug 16, 2016
Laser assembly and inspection system using monolithic bandwidth narrowing apparatus
KLA TENCOR CORP5 citations73
US9768577B2Sep 19, 2017
Semiconductor inspection and metrology system using laser pulse multiplier
KLA TENCOR CORP5 citations72
US10495582B2Dec 3, 2019
System and method for reducing the bandwidth of a laser and an inspection system and method using a laser
KLA TENCOR CORP1 citations62
US10439355B2Oct 8, 2019
193nm laser and inspection system
KLA TENCOR CORP0 citations52
US9935421B2Apr 3, 2018
193nm laser and inspection system
KLA TENCOR CORP0 citations52
US10044164B2Aug 7, 2018
Laser repetition rate multiplier and flat-top beam profile generators using mirrors and/or prisms
KLA TENCOR CORP0 citations51