Inventor
MACNEIL JOHN
US18 patents
⚠️ This page may combine multiple inventors who share the name “MACNEIL JOHN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SPTS TECHNOLOGIES LTD
5 patentsUS11643744B2May 9, 2023
Apparatus for electrochemically processing semiconductor substrates
SPTS TECHNOLOGIES LTD0 citations57
US11236433B2Feb 1, 2022
Apparatus and method for processing a substrate
SPTS TECHNOLOGIES LTD0 citations57
US11066754B2Jul 20, 2021
Apparatus for electrochemically processing semiconductor substrates
SPTS TECHNOLOGIES LTD0 citations57
US10385471B2Aug 20, 2019
Electrochemical deposition chamber
SPTS TECHNOLOGIES LTD0 citations41
US8728337B2May 20, 2014
Positive displacement pumping chamber
SPTS TECHNOLOGIES LTD0 citations27
TRIKON HOLDINGS LTD
4 patentsUS6653247B2Nov 25, 2003
Dielectric layer for a semiconductor device and method of producing the same
TRIKON HOLDINGS LTD41 citations95
US6846757B2Jan 25, 2005
Dielectric layer for a semiconductor device and method of producing the same
TRIKON HOLDINGS LTD26 citations92
US6640840B1Nov 4, 2003
Delivery of liquid precursors to semiconductor processing reactors
TRIKON HOLDINGS LTD46 citations92
US6627535B2Sep 30, 2003
Methods and apparatus for forming a film on a substrate
TRIKON HOLDINGS LTD30 citations91
AVIZA TECHNOLOGY LTD
3 patentsUS7205246B2Apr 17, 2007
Forming low k dielectric layers
AVIZA TECHNOLOGY LTD518 citations92
US7351669B2Apr 1, 2008
Method of forming a substantially closed void
AVIZA TECHNOLOGY LTD9 citations83
US7732307B2Jun 8, 2010
Method of forming amorphous TiN by thermal chemical vapor deposition (CVD)
AVIZA TECHNOLOGY LTD0 citations46