Inventor

RAAIJMAKERS IVO

US97 patents

⚠️ This page may combine multiple inventors who share the name “RAAIJMAKERS IVO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

RAAIJMAKERS IVO

ASM INC

Apparatus and method for growth of a thin film

Thin films and method of making them

Apparatus and method for growth of a thin film

Light scattering process chamber walls

In situ dielectric stacks

Method of cooling wafers

Substrate transfer system for semiconductor processing equipment

Method of processing wafers with low mass support

Quartz wafer processing chamber

Situ dielectric stacks

Long life high temperature process chamber

Dual arm linear hand-off wafer transfer assembly

Substrate transfer system for semiconductor processing equipment

Epitaxial semiconductor deposition methods and structures

Self-centering wafer support system

Low mass wafer support system

Wafer holder

In situ growth of oxide and silicon layers

Thin films and methods of making them

Method of depositing silicon with high step coverage

Apparatus for cooling substrates

ASM INT

Graded thin films

Conformal thin films over textured capacitor electrodes

Graded thin films

Protective layers prior to alternating layer deposition

Selective silicide process

Thin films

Method of fabricating trench isolation structures for integrated circuits using atomic layer deposition

Method of making conformal lining layers for damascene metallization

Atomic layer deposition reactor

Apparatus and method for growth of a thin film

Method for controlling conformality with alternating layer deposition

Thin films for magnetic device

APPLIED MATERIALS INC

Construction of a tantalum nitride film on a semiconductor wafer

Construction of a film on a semiconductor wafer

Degassing method and apparatus

Water lift mechanism with electrostatic pickup and method for transferring a workpiece

Method and apparatus for improving the conformality of sputter deposited films

Adhesion layer for tungsten deposition

ASM MICROCHEMISTRY OY

Method of forming graded thin films using alternating pulses of vapor phase reactants

Method of forming ultrathin oxide layer

Protective layers prior to alternating layer deposition

Sealing porous structures

ASM IP HOLDING BV

Selective deposition of metals, metal oxides, and dielectrics

Method for forming conformal, homogeneous dielectric film by cyclic deposition and heat treatment

Selective deposition of metals, metal oxides, and dielectrics

ASM INTERNAT NV

Conformal thin films over textured capacitor electrodes

Copper interconnect structure having stuffed diffusion barrier

RAAIJMAKERS IVO

Selective silicide process

ASM AMERICAN INC

Semiconductor wafer position shift measurement and correction