Inventor
MAROHL DAN
US21 patents
⚠️ This page may combine multiple inventors who share the name “MAROHL DAN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
14 patentsUS6258220B1Jul 10, 2001
Electro-chemical deposition system
APPLIED MATERIALS INC443 citations98
US6113698ASep 5, 2000
Degassing method and apparatus
APPLIED MATERIALS INC54 citations96
US6635157B2Oct 21, 2003
Electro-chemical deposition system
APPLIED MATERIALS INC43 citations95
US5762748AJun 9, 1998
Lid and door for a vacuum chamber and pretreatment therefor
APPLIED MATERIALS INC56 citations95
US5401319AMar 28, 1995
Lid and door for a vacuum chamber and pretreatment therefor
APPLIED MATERIALS INC69 citations95
US6409453B1Jun 25, 2002
End effector for wafer handler in processing system
APPLIED MATERIALS INC73 citations94
US6263587B1Jul 24, 2001
Degassing method using simultaneous dry gas flux pressure and vacuum
APPLIED MATERIALS INC33 citations92
US6182376B1Feb 6, 2001
Degassing method and apparatus
APPLIED MATERIALS INC27 citations92
US5964561AOct 12, 1999
Compact apparatus and method for storing and loading semiconductor wafer carriers
APPLIED MATERIALS INC50 citations92
US5697427ADec 16, 1997
Apparatus and method for cooling a substrate
APPLIED MATERIALS INC29 citations92
US5565058AOct 15, 1996
Lid and door for a vacuum chamber and pretreatment therefor
APPLIED MATERIALS INC27 citations92
US5725718AMar 10, 1998
Clamp ring for domed heated pedestal in wafer processing chamber
APPLIED MATERIALS INC44 citations91
US7497932B2Mar 3, 2009
Electro-chemical deposition system
APPLIED MATERIALS INC9 citations82
US5929373AJul 27, 1999
High voltage feed through
APPLIED MATERIALS INC18 citations78
LAM RES CORP
6 patentsUS10109460B2Oct 23, 2018
Universal non-invasive chamber impedance measurement system and associated methods
LAM RES CORP12 citations82
US10923322B2Feb 16, 2021
Articulated direct-mount inductor and associated systems and methods
LAM RES CORP3 citations69
US12087557B2Sep 10, 2024
Substrate processing system including coil with RF powered faraday shield
LAM RES CORP0 citations61
US12526923B2Jan 13, 2026
Selected reject band non-radiofrequency-coupling tile and associated methods and systems
LAM RES CORP0 citations60
US12394603B2Aug 19, 2025
Multizone gas distribution plate for trench profile optimization
LAM RES CORP0 citations52
US12186887B2Jan 7, 2025
Collaborative robot system on a mobile cart with a chamber docking system
LAM RES CORP0 citations48