Inventor
URBANUS WILLEM HENK
NL13 patents
⚠️ This page may combine multiple inventors who share the name “URBANUS WILLEM HENK”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
MAPPER LITHOGRAPHY IP BV
6 patentsUS9165693B2Oct 20, 2015
Multi-electrode cooling arrangement
MAPPER LITHOGRAPHY IP BV7 citations83
US10037864B2Jul 31, 2018
High voltage shielding and cooling in a charged particle beam generator
MAPPER LITHOGRAPHY IP BV3 citations72
US9653261B2May 16, 2017
Charged particle lithography system and beam generator
MAPPER LITHOGRAPHY IP BV2 citations72
US8916837B2Dec 23, 2014
Charged particle lithography system with intermediate chamber
MAPPER LITHOGRAPHY IP BV4 citations71
US9905322B2Feb 27, 2018
Multi-electrode electron optics
MAPPER LITHOGRAPHY IP BV0 citations51
US9355751B2May 31, 2016
Multi-electrode stack arrangement
MAPPER LITHOGRAPHY IP BV0 citations51
ASML NETHERLANDS BV
6 patentsUS12387903B2Aug 12, 2025
Aberration correction in charged particle system
ASML NETHERLANDS BV0 citations62
US11961627B2Apr 16, 2024
Vacuum chamber arrangement for charged particle beam generator
ASML NETHERLANDS BV0 citations62
US11705252B2Jul 18, 2023
Vacuum chamber arrangement for charged particle beam generator
ASML NETHERLANDS BV0 citations62
US11348756B2May 31, 2022
Aberration correction in charged particle system
ASML NETHERLANDS BV1 citations62
US11094426B2Aug 17, 2021
Vacuum chamber arrangement for charged particle beam generator
ASML NETHERLANDS BV0 citations62
US10586625B2Mar 10, 2020
Vacuum chamber arrangement for charged particle beam generator
ASML NETHERLANDS BV0 citations51