Inventor
FREED REGINA
US31 patents
⚠️ This page may combine multiple inventors who share the name “FREED REGINA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
MICROMATERIALS LLC
16 patentsUS10424507B2Sep 24, 2019
Fully self-aligned via
MICROMATERIALS LLC5 citations83
US10600688B2Mar 24, 2020
Methods of producing self-aligned vias
MICROMATERIALS LLC6 citations73
US10593594B2Mar 17, 2020
Selectively etched self-aligned via processes
MICROMATERIALS LLC2 citations73
US10892187B2Jan 12, 2021
Method for creating a fully self-aligned via
MICROMATERIALS LLC2 citations72
US10553485B2Feb 4, 2020
Methods of producing fully self-aligned vias and contacts
MICROMATERIALS LLC5 citations72
US10790191B2Sep 29, 2020
Selective removal process to create high aspect ratio fully self-aligned via
MICROMATERIALS LLC3 citations71
US11705366B2Jul 18, 2023
Methods for controllable metal and barrier-liner recess
MICROMATERIALS LLC0 citations62
US11062942B2Jul 13, 2021
Methods for controllable metal and barrier-liner recess
MICROMATERIALS LLC0 citations62
US10699953B2Jun 30, 2020
Method for creating a fully self-aligned via
MICROMATERIALS LLC1 citations62
US11037825B2Jun 15, 2021
Selective removal process to create high aspect ratio fully self-aligned via
MICROMATERIALS LLC0 citations61
US11437274B2Sep 6, 2022
Fully self-aligned via
MICROMATERIALS LLC1 citations59
US10410921B2Sep 10, 2019
Fully self-aligned via
MICROMATERIALS LLC0 citations52
US11164938B2Nov 2, 2021
DRAM capacitor module
MICROMATERIALS LLC0 citations51
US10522404B2Dec 31, 2019
Fully self-aligned via
MICROMATERIALS LLC0 citations51
US10892183B2Jan 12, 2021
Methods for removing metal oxides
MICROMATERIALS LLC0 citations50
US10573555B2Feb 25, 2020
Methods of producing self-aligned grown via
MICROMATERIALS LLC0 citations41
APPLIED MATERIALS INC
11 patentsUS10622221B2Apr 14, 2020
Methods of etching metal oxides with less etch residue
APPLIED MATERIALS INC2 citations72
US11621172B2Apr 4, 2023
Vapor phase thermal etch solutions for metal oxo photoresists
APPLIED MATERIALS INC2 citations71
US12068170B2Aug 20, 2024
Vapor phase thermal etch solutions for metal oxo photoresists
APPLIED MATERIALS INC0 citations61
US12033866B2Jul 9, 2024
Vapor phase thermal etch solutions for metal oxo photoresists
APPLIED MATERIALS INC0 citations61
US11232955B2Jan 25, 2022
Methods of etching metal oxides with less etch residue
APPLIED MATERIALS INC0 citations61
US11869807B2Jan 9, 2024
Fully self-aligned subtractive etch
APPLIED MATERIALS INC1 citations60
US11133152B2Sep 28, 2021
Methods and apparatus for performing profile metrology on semiconductor structures
APPLIED MATERIALS INC0 citations60
US11217448B2Jan 4, 2022
Methods for reducing transfer pattern defects in a semiconductor device
APPLIED MATERIALS INC0 citations59
US10777414B1Sep 15, 2020
Methods for reducing transfer pattern defects in a semiconductor device
APPLIED MATERIALS INC1 citations59
US12084764B2Sep 10, 2024
Vapor phase photoresists deposition
APPLIED MATERIALS INC0 citations49
US12416863B2Sep 16, 2025
Dry develop process of photoresist
APPLIED MATERIALS INC0 citations45