Inventor

MITRA UDAY

US24 patents

⚠️ This page may combine multiple inventors who share the name “MITRA UDAY”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

MITRA UDAY

MICROMATERIALS LLC

Fully self-aligned via

Methods of producing self-aligned vias

Selectively etched self-aligned via processes

Method for creating a fully self-aligned via

Methods of producing fully self-aligned vias and contacts

Selective removal process to create high aspect ratio fully self-aligned via

Methods for controllable metal and barrier-liner recess

Methods for controllable metal and barrier-liner recess

Method for creating a fully self-aligned via

Selective removal process to create high aspect ratio fully self-aligned via

Fully self-aligned via

Fully self-aligned via

DRAM capacitor module

Fully self-aligned via

Methods for removing metal oxides

Methods of producing self-aligned grown via

Methods of producing self-aligned vias

APPLIED MATERIALS INC

Self-aligned multiple spacer patterning schemes for advanced nanometer technology

Methods of etching metal oxides with less etch residue

Methods of etching metal oxides with less etch residue

Integrated wet clean for epitaxial growth

Self-aligned multiple spacer patterning schemes for advanced nanometer technology

PHILIPS CORP

Rapid plasma hydrogenation process for polysilicon MOSFETs

SHEN MEIHUA

Method for fabricating a semiconductor device having a lanthanum-family-based oxide layer