Inventor
KOOIKER ALLARD EELCO
NL10 patents
⚠️ This page may combine multiple inventors who share the name “KOOIKER ALLARD EELCO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML NETHERLANDS BV
8 patentsUS11908656B2Feb 20, 2024
Stage apparatus suitable for a particle beam apparatus
ASML NETHERLANDS BV0 citations59
US12525900B2Jan 13, 2026
Object table comprising an electrostatic clamp
ASML NETHERLANDS BV0 citations57
US12028000B2Jul 2, 2024
Object table comprising an electrostatic clamp
ASML NETHERLANDS BV0 citations57
US11637512B2Apr 25, 2023
Object table comprising an electrostatic clamp
ASML NETHERLANDS BV0 citations57
US11764030B2Sep 19, 2023
Stage apparatus suitable for electron beam inspection apparatus
ASML NETHERLANDS BV0 citations53
US9971254B2May 15, 2018
Sensor, lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations48
US9753382B2Sep 5, 2017
Sensor, lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV1 citations48
US10768025B2Sep 8, 2020
Encoder, position measurement system and lithographic apparatus involving an enclosing device
ASML NETHERLANDS BV0 citations33
KNARREN BASTIAAN ANDREAS WILHELMUS HUBERTUS
2 patentsUS8817228B2Aug 26, 2014
Cooling arrangement and lithographic apparatus comprising a resilient wall creating a gap between a detector module housing and a heat sink of the cooling arrangement
KNARREN BASTIAAN ANDREAS WILHELMUS HUBERTUS0 citations38
US9081309B2Jul 14, 2015
Detector module, cooling arrangement and lithographic apparatus comprising a detector module
KNARREN BASTIAAN ANDREAS WILHELMUS HUBERTUS0 citations31