Inventor
COSIJNS SUZANNE JOHANNA ANTONETTA GEERTRUDA
NL8 patents
⚠️ This page may combine multiple inventors who share the name “COSIJNS SUZANNE JOHANNA ANTONETTA GEERTRUDA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML NETHERLANDS BV
7 patentsUS11287242B2Mar 29, 2022
Cyclic error measurements and calibration procedures in interferometers
ASML NETHERLANDS BV7 citations84
US9470988B2Oct 18, 2016
Substrate positioning system, lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV10 citations78
US12247883B2Mar 11, 2025
Wavelength tracking system, method to calibrate a wavelength tracking system, lithographic apparatus, method to determine an absolute position of a movable object, and interferometer system
ASML NETHERLANDS BV0 citations53
US10345717B2Jul 9, 2019
Lithographic apparatus and method
ASML NETHERLANDS BV0 citations47
US9977348B2May 22, 2018
Lithographic apparatus and method
ASML NETHERLANDS BV1 citations47
US10768025B2Sep 8, 2020
Encoder, position measurement system and lithographic apparatus involving an enclosing device
ASML NETHERLANDS BV0 citations33
US10866531B2Dec 15, 2020
Athermalization of an alignment system
ASML NETHERLANDS BV0 citations29