Inventor
KIM KYEONGHUN
KR5 patents
⚠️ This page may combine multiple inventors who share the name “KIM KYEONGHUN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SAMSUNG ELECTRONICS CO LTD
4 patentsUS11264291B2Mar 1, 2022
Sensor device and etching apparatus having the same
SAMSUNG ELECTRONICS CO LTD9 citations79
US11215506B2Jan 4, 2022
Substrate processing apparatus, substrate processing module, and semiconductor device fabrication method
SAMSUNG ELECTRONICS CO LTD0 citations59
US10935429B2Mar 2, 2021
Substrate processing apparatus, substrate processing module, and semiconductor device fabrication method
SAMSUNG ELECTRONICS CO LTD0 citations59
US11715628B2Aug 1, 2023
Method of forming plasma processing apparatus, related apparatus, and method of forming semiconductor device using the same
SAMSUNG ELECTRONICS CO LTD0 citations56