Inventor
MUN JEONGIL
KR6 patents
Patents
6 patentsUS11264291B2Mar 1, 2022
Sensor device and etching apparatus having the same
SAMSUNG ELECTRONICS CO LTD9 citations79
US11092495B2Aug 17, 2021
Optical emission spectroscopy system, method of calibrating the same, and method of fabricating semiconductor device
SAMSUNG ELECTRONICS CO LTD1 citations60
US11215506B2Jan 4, 2022
Substrate processing apparatus, substrate processing module, and semiconductor device fabrication method
SAMSUNG ELECTRONICS CO LTD0 citations59
US10935429B2Mar 2, 2021
Substrate processing apparatus, substrate processing module, and semiconductor device fabrication method
SAMSUNG ELECTRONICS CO LTD0 citations59
US11715628B2Aug 1, 2023
Method of forming plasma processing apparatus, related apparatus, and method of forming semiconductor device using the same
SAMSUNG ELECTRONICS CO LTD0 citations56
US11862440B2Jan 2, 2024
Semiconductor processing equipment including electrostatic chuck for plasma processing
SAMSUNG ELECTRONICS CO LTD0 citations50