Inventor
SACHAN MADHUR
US13 patents
⚠️ This page may combine multiple inventors who share the name “SACHAN MADHUR”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
9 patentsUS11621172B2Apr 4, 2023
Vapor phase thermal etch solutions for metal oxo photoresists
APPLIED MATERIALS INC2 citations71
US12068170B2Aug 20, 2024
Vapor phase thermal etch solutions for metal oxo photoresists
APPLIED MATERIALS INC0 citations61
US12033866B2Jul 9, 2024
Vapor phase thermal etch solutions for metal oxo photoresists
APPLIED MATERIALS INC0 citations61
US12300491B2May 13, 2025
Deposition of semiconductor integration films
APPLIED MATERIALS INC0 citations60
US11886120B2Jan 30, 2024
Deposition of semiconductor integration films
APPLIED MATERIALS INC1 citations60
US11869807B2Jan 9, 2024
Fully self-aligned subtractive etch
APPLIED MATERIALS INC1 citations60
US11562904B2Jan 24, 2023
Deposition of semiconductor integration films
APPLIED MATERIALS INC1 citations60
US11133152B2Sep 28, 2021
Methods and apparatus for performing profile metrology on semiconductor structures
APPLIED MATERIALS INC0 citations60
US12416863B2Sep 16, 2025
Dry develop process of photoresist
APPLIED MATERIALS INC0 citations45
MICROMATERIALS LLC
3 patentsUS10790191B2Sep 29, 2020
Selective removal process to create high aspect ratio fully self-aligned via
MICROMATERIALS LLC3 citations71
US11037825B2Jun 15, 2021
Selective removal process to create high aspect ratio fully self-aligned via
MICROMATERIALS LLC0 citations61
US11437274B2Sep 6, 2022
Fully self-aligned via
MICROMATERIALS LLC1 citations59