Inventor
NAGAIWA TOSHIFUMI
TW10 patents
⚠️ This page may combine multiple inventors who share the name “NAGAIWA TOSHIFUMI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
8 patentsUS6723202B2Apr 20, 2004
Worktable device and plasma processing apparatus for semiconductor process
TOKYO ELECTRON LTD124 citations94
US11342165B2May 24, 2022
Plasma processing method
TOKYO ELECTRON LTD0 citations60
US11264208B2Mar 1, 2022
Plasma processing apparatus and method for controlling radio-frequency power supply of plasma processing apparatus
TOKYO ELECTRON LTD0 citations60
US10714318B2Jul 14, 2020
Plasma processing method
TOKYO ELECTRON LTD1 citations60
US7732340B2Jun 8, 2010
Method for adjusting a critical dimension in a high aspect ratio feature
TOKYO ELECTRON LTD5 citations58
US10991551B2Apr 27, 2021
Cleaning method and plasma processing apparatus
TOKYO ELECTRON LTD0 citations55
US11171007B2Nov 9, 2021
Plasma processing apparatus and plasma etching method
TOKYO ELECTRON LTD0 citations49
US11610766B2Mar 21, 2023
Target object processing method and plasma processing apparatus
TOKYO ELECTRON LTD0 citations48