Inventor
YOUNG DOUGLAS W
US35 patents
⚠️ This page may combine multiple inventors who share the name “YOUNG DOUGLAS W”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
NUTOOL INC
12 patentsUS6630059B1Oct 7, 2003
Workpeice proximity plating apparatus
NUTOOL INC92 citations98
US6352623B1Mar 5, 2002
Vertically configured chamber used for multiple processes
NUTOOL INC131 citations98
US6666959B2Dec 23, 2003
Semiconductor workpiece proximity plating methods and apparatus
NUTOOL INC50 citations96
US6478936B1Nov 12, 2002
Anode assembly for plating and planarizing a conductive layer
NUTOOL INC46 citations96
US6612915B1Sep 2, 2003
Work piece carrier head for plating and polishing
NUTOOL INC74 citations94
US6908374B2Jun 21, 2005
Chemical mechanical polishing endpoint detection
NUTOOL INC43 citations92
US6468139B1Oct 22, 2002
Polishing apparatus and method with a refreshing polishing belt and loadable housing
NUTOOL INC26 citations92
US6464571B2Oct 15, 2002
Polishing apparatus and method with belt drive system adapted to extend the lifetime of a refreshing polishing belt provided therein
NUTOOL INC19 citations92
US6604988B2Aug 12, 2003
Polishing apparatus and method with belt drive system adapted to extend the lifetime of a refreshing polishing belt provided therein
NUTOOL INC8 citations74
US6773576B2Aug 10, 2004
Anode assembly for plating and planarizing a conductive layer
NUTOOL INC5 citations73
US6634935B2Oct 21, 2003
Single drive system for a bi-directional linear chemical mechanical polishing apparatus
NUTOOL INC8 citations73
US6589105B2Jul 8, 2003
Pad tensioning method and system in a bi-directional linear polisher
NUTOOL INC10 citations70
ASM NUTOOL INC
8 patentsUS6857947B2Feb 22, 2005
Advanced chemical mechanical polishing system with smart endpoint detection
ASM NUTOOL INC43 citations90
US6932679B2Aug 23, 2005
Apparatus and method for loading a wafer in polishing system
ASM NUTOOL INC3 citations63
US7059944B2Jun 13, 2006
Integrated system for processing semiconductor wafers
ASM NUTOOL INC3 citations62
US6969456B2Nov 29, 2005
Method of using vertically configured chamber used for multiple processes
ASM NUTOOL INC2 citations62
US6884334B2Apr 26, 2005
Vertically configured chamber used for multiple processes
ASM NUTOOL INC3 citations60
US6939203B2Sep 6, 2005
Fluid bearing slide assembly for workpiece polishing
ASM NUTOOL INC0 citations52
US6926589B2Aug 9, 2005
Chemical mechanical polishing apparatus and methods using a flexible pad and variable fluid flow for variable polishing
ASM NUTOOL INC0 citations49
US6908368B2Jun 21, 2005
Advanced Bi-directional linear polishing system and method
ASM NUTOOL INC0 citations48
LAM RES CORP
5 patentsUS5762536AJun 9, 1998
Sensors for a linear polisher
LAM RES CORP150 citations98
US5871390AFeb 16, 1999
Method and apparatus for aligning and tensioning a pad/belt used in linear planarization for chemical mechanical polishing
LAM RES CORP75 citations96
US5916012AJun 29, 1999
Control of chemical-mechanical polishing rate across a substrate surface for a linear polisher
LAM RES CORP112 citations95
US5722877AMar 3, 1998
Technique for improving within-wafer non-uniformity of material removal for performing CMP
LAM RES CORP132 citations94
US6425812B1Jul 30, 2002
Polishing head for chemical mechanical polishing using linear planarization technology
LAM RES CORP13 citations73
APPLIED MATERIALS INC
3 patentsUS6278089B1Aug 21, 2001
Heater for use in substrate processing
APPLIED MATERIALS INC68 citations95
US6359264B1Mar 19, 2002
Thermal cycling module
APPLIED MATERIALS INC78 citations93
US6313441B1Nov 6, 2001
Control system and method for providing variable ramp rate operation of a thermal cycling system
APPLIED MATERIALS INC38 citations92