Inventor
MAY ROBERT C
US19 patents
⚠️ This page may combine multiple inventors who share the name “MAY ROBERT C”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
BROOKS AUTOMATION INC
8 patentsUS9224628B2Dec 29, 2015
Reduced capacity carrier, transport, load port, buffer system
BROOKS AUTOMATION INC16 citations92
US7798758B2Sep 21, 2010
Reduced capacity carrier, transport, load port, buffer system
BROOKS AUTOMATION INC16 citations84
US10395959B2Aug 27, 2019
Substrate transport
BROOKS AUTOMATION INC6 citations82
US10679882B2Jun 9, 2020
Reduced capacity carrier, transport, load port, buffer system
BROOKS AUTOMATION INC3 citations73
US9978623B2May 22, 2018
Side opening unified pod
BROOKS AUTOMATION INC2 citations72
US11235935B2Feb 1, 2022
Substrate transport apparatus
BROOKS AUTOMATION INC3 citations71
US11121015B2Sep 14, 2021
Substrate transport
BROOKS AUTOMATION INC1 citations71
US11201070B2Dec 14, 2021
Side opening unified pod
BROOKS AUTOMATION INC0 citations62
BUFANO MICHAEL L
3 patentsUS8272827B2Sep 25, 2012
Reduced capacity carrier, transport, load port, buffer system
BUFANO MICHAEL L26 citations91
US8328495B2Dec 11, 2012
Reduced capacity carrier, transport, load port, buffer system
BUFANO MICHAEL L13 citations83
US8267634B2Sep 18, 2012
Reduced capacity carrier, transport, load port, buffer system
BUFANO MICHAEL L19 citations83