Inventor
YUAN YONGWEN
US4 patents
⚠️ This page may combine multiple inventors who share the name “YUAN YONGWEN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOSOH SMD INC
3 patentsUS9566618B2Feb 14, 2017
Silicon sputtering target with special surface treatment and good particle performance and methods of making the same
TOSOH SMD INC2 citations68
US12205804B2Jan 21, 2025
Silicon sputtering target with special surface treatment and good particle performance and methods of making the same
TOSOH SMD INC0 citations58
US9831073B2Nov 28, 2017
Low deflection sputtering target assembly and methods of making same
TOSOH SMD INC0 citations48