Inventor
IVANOV EUGENE Y
US28 patents
⚠️ This page may combine multiple inventors who share the name “IVANOV EUGENE Y”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOSOH SMD INC
22 patentsUS6840427B2Jan 11, 2005
Method of manufacturing sputter targets with internal cooling channels
TOSOH SMD INC46 citations96
US6749103B1Jun 15, 2004
Low temperature sputter target bonding method and target assemblies produced thereby
TOSOH SMD INC108 citations96
US5653856AAug 5, 1997
Methods of bonding targets to backing plate members using gallium based solder pastes and target/backing plate assemblies bonded thereby
TOSOH SMD INC55 citations94
US5522535AJun 4, 1996
Methods and structural combinations providing for backing plate reuse in sputter target/backing plate assemblies
TOSOH SMD INC81 citations94
US7063773B2Jun 20, 2006
High purity sputter targets with target end-of-life indication and method of manufacture
TOSOH SMD INC26 citations92
US6955852B2Oct 18, 2005
Method of manufacturing sputter targets with internal cooling channels
TOSOH SMD INC25 citations92
US6872284B2Mar 29, 2005
Target and method of optimizing target profile
TOSOH SMD INC42 citations92
US6562207B1May 13, 2003
Refractory metal silicide alloy sputter targets, use and manufacture thereof
TOSOH SMD INC20 citations92
US5778302AJul 7, 1998
Methods of making Cr-Me sputter targets and targets produced thereby
TOSOH SMD INC24 citations92
US7114643B2Oct 3, 2006
Friction fit target assembly for high power sputtering operation
TOSOH SMD INC37 citations91
US6725522B1Apr 27, 2004
Method of assembling target and backing plates
TOSOH SMD INC45 citations91
US5593082AJan 14, 1997
Methods of bonding targets to backing plate members using solder pastes and target/backing plate assemblies bonded thereby
TOSOH SMD INC51 citations90
US7922881B2Apr 12, 2011
Sputtering target with an insulating ring and a gap between the ring and the target
TOSOH SMD INC9 citations82
US6423196B1Jul 23, 2002
Method of making Ni-Si magnetron sputtering targets and targets made thereby
TOSOH SMD INC13 citations74
US8020748B2Sep 20, 2011
Sputtering target assembly and method of making same
TOSOH SMD INC5 citations71
US11062889B2Jul 13, 2021
Method of production of uniform metal plates and sputtering targets made thereby
TOSOH SMD INC2 citations68
US9566618B2Feb 14, 2017
Silicon sputtering target with special surface treatment and good particle performance and methods of making the same
TOSOH SMD INC2 citations68
US6780295B2Aug 24, 2004
Method for making Ni-Si magnetron sputtering targets and targets made thereby
TOSOH SMD INC3 citations63
US10655214B2May 19, 2020
Method of making a tantalum sputter target and sputter targets made thereby
TOSOH SMD INC1 citations60
US12205804B2Jan 21, 2025
Silicon sputtering target with special surface treatment and good particle performance and methods of making the same
TOSOH SMD INC0 citations58
US12448335B2Oct 21, 2025
Magnesium oxide sputtering target and method of making same
TOSOH SMD INC0 citations55
US9831073B2Nov 28, 2017
Low deflection sputtering target assembly and methods of making same
TOSOH SMD INC0 citations48
IVANOV EUGENE Y
4 patentsUS8453487B2Jun 4, 2013
Circular groove pressing mechanism and method for sputtering target manufacturing
IVANOV EUGENE Y2 citations59
US8506882B2Aug 13, 2013
High purity target manufacturing methods
IVANOV EUGENE Y0 citations50
US8235277B2Aug 7, 2012
Sputtering target assembly and method of making same
IVANOV EUGENE Y0 citations48
US8992748B2Mar 31, 2015
Sputtering target
IVANOV EUGENE Y1 citations44