Inventor
FRAUSTO PHIL
US2 patents
Patents
2 patentsUS9566618B2Feb 14, 2017
Silicon sputtering target with special surface treatment and good particle performance and methods of making the same
TOSOH SMD INC2 citations68
US12205804B2Jan 21, 2025
Silicon sputtering target with special surface treatment and good particle performance and methods of making the same
TOSOH SMD INC0 citations58