Inventor
MIAO WEIFANG
US7 patents
⚠️ This page may combine multiple inventors who share the name “MIAO WEIFANG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOSOH SMD INC
4 patentsUS9566618B2Feb 14, 2017
Silicon sputtering target with special surface treatment and good particle performance and methods of making the same
TOSOH SMD INC2 citations68
US12205804B2Jan 21, 2025
Silicon sputtering target with special surface treatment and good particle performance and methods of making the same
TOSOH SMD INC0 citations58
US9150956B2Oct 6, 2015
Monolithic aluminum alloy target and method of manufacturing
TOSOH SMD INC1 citations50
US12545993B2Feb 10, 2026
Tantalum sputtering target with improved performance and predictability and method of manufacturing
TOSOH SMD INC0 citations44