Inventor
TAN HARUHIKO
JP15 patents
Patents
15 patentsUS11476138B2Oct 18, 2022
Diagnostic system of substrate transfer hand
KAWASAKI HEAVY IND LTD3 citations71
US11328947B1May 10, 2022
Aligner apparatus and alignment method
KAWASAKI HEAVY IND LTD3 citations70
US11331798B2May 17, 2022
Robot system and robot controller
KAWASAKI HEAVY IND LTD2 citations67
US11926039B2Mar 12, 2024
Robot
KAWASAKI HEAVY IND LTD0 citations61
US11845179B2Dec 19, 2023
Wafer jig, robot system, communication method, and robot teaching method
KAWASAKI HEAVY IND LTD0 citations61
US11203121B2Dec 21, 2021
Robot, control device of robot, and method of teaching position of robot
KAWASAKI HEAVY IND LTD1 citations61
US11110599B2Sep 7, 2021
Robot, control device of robot, and method of teaching position of robot
KAWASAKI HEAVY IND LTD1 citations61
US12398000B2Aug 26, 2025
Substrate conveying robot system
KAWASAKI HEAVY IND LTD1 citations60
US12148646B2Nov 19, 2024
Aligner apparatus
KAWASAKI HEAVY IND LTD0 citations59
US12002695B2Jun 4, 2024
Transport system and determination method
KAWASAKI HEAVY IND LTD1 citations59
US12046501B2Jul 23, 2024
Substrate handling apparatus and method of handling substrate
KAWASAKI HEAVY IND LTD1 citations56
US12216451B2Feb 4, 2025
Robot system
KAWASAKI HEAVY IND LTD0 citations50
US12088232B2Sep 10, 2024
Short-circuiting device and robot system including the same
KAWASAKI HEAVY IND LTD0 citations49
US12162145B2Dec 10, 2024
Substrate conveying robot and substrate conveying robot system
KAWASAKI HEAVY IND LTD0 citations48
US11330725B2May 10, 2022
Housing
KAWASAKI HEAVY IND LTD0 citations47