Inventor

BREINER LYLE D

US30 patents

⚠️ This page may combine multiple inventors who share the name “BREINER LYLE D”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

BREINER LYLE D

MICRON TECHNOLOGY INC

Methods and apparatus for processing microfeature workpieces, e.g., for depositing materials on microfeature workpieces

Method to form hemi-spherical grain (HSG) silicon from amorphous silicon

Method to form hemi-spherical grain (HSG) silicon

Method of atomic layer deposition on plural semiconductor substrates simultaneously

Methods for treating pluralities of discrete semiconductor substrates

Capacitor structures

Method of forming DRAM trench capacitor with metal layer over hemispherical grain polysilicon

Method to form hemi-spherical grain (HSG) silicon

Method for enhancing oxide to nitride selectivity through the use of independent heat control

Systems for depositing material onto workpieces in reaction chambers and methods for removing byproducts from reaction chambers

Capacitor constructions and methods of forming

Microfeature workpiece processing apparatus and methods for controlling deposition of materials on microfeature workpieces

Methods for forming small-scale capacitor structures

Methods and apparatus for processing microfeature workpieces; methods for conditioning ALD reaction chambers

Methods and systems for controlling temperature during microfeature workpiece processing, e.g., CVD deposition

Microfeature workpiece processing apparatus and methods for batch deposition of materials on microfeature workpieces

Methods and systems for controlling temperature during microfeature workpiece processing, E.G. CVD deposition

Microfeature workpiece processing apparatus and methods for controlling deposition of materials on microfeature workpieces

Methods for treating semiconductor substrates

Methods for treating pluralities of discrete semiconductor substrates

Methods of forming deuterated silicon nitride-containing materials

Methods for forming small-scale capacitor structures

Electronic systems

Capacitor constructions and semiconductor structures

Capacitor constructions and rugged silicon-containing surfaces

Methods of forming rugged semiconductor-containing surfaces

DRAM cells

Methods for treating pluralities of discrete semiconductor substrates

Methods of forming rugged silicon-containing surfaces

BEAMAN KEVIN L

Methods and systems for controlling temperature during microfeature workpiece processing, E.G., CVD deposition