Inventor

BLALOCK GUY T

US138 patents

⚠️ This page may combine multiple inventors who share the name “BLALOCK GUY T”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

BLALOCK GUY T

MICRON TECHNOLOGY INC

Wafer planarization using a uniform layer of material and method and apparatus for forming uniform layer of material used in semiconductor processing

Planarization process for semiconductor substrates

Methods of forming carbon-containing layers

Method and apparatus for controlling the temperature of a gas distribution plate in a process reactor

Small pores defined by a disposable internal spacer for use in chalcogenide memories

Method of making small pores defined by a disposable internal spacer for use in chalcogenide memories

Method of forming a capacitor using a photoresist contact sidewall having standing wave ripples

Method for making electrical contact with an active area through sub-micron contact openings and a semiconductor device

Method for enhancing silicon dioxide to silicon nitride selectivity

Waveguide for thermo optic device

Resonator for thermo optic device

Waveguide for thermo optic device

Methods and apparatuses for making and using planarizing pads for mechanical and chemical-mechanical planarization of microelectronic substrates

Method of forming a capacitor structure

Self-limiting method of reducing contamination in a contact opening, method of making contacts and semiconductor devices therewith, and resulting structures

Plasma producing tools, dual-source plasma etchers, dual-source plasma etching methods, and method of forming planar coil dual-source plasma etchers

Dilute composition cleaning method

Etchant with selectivity for doped silicon dioxide over undoped silicon dioxide and silicon nitride, processes which employ the etchant, and structures formed thereby

Dual-source plasma etchers, dual-source plasma etching methods, and methods of forming planar coil dual-source plasma etchers

Removal of carbon-based polymer residues with ozone, useful in the cleaning of plasma reactors

Method for applying uniform pressurized film across wafer

Resistive heater for thermo optic device

Resistive heater for thermo optic device

Resonator for thermo optic device

Resistive heater for thermo optic device

Atomic layer deposition methods

Resistive heater for thermo optic device

Methods and apparatuses for making and using planarizing pads for mechanical and chemical-mechanical planarization of microelectronic substrates

Apparatus for improved low pressure inductively coupled high density plasma reactor

Method of forming flash memory

Plasma etching methods

Methods of forming materials within openings, and method of forming isolation regions

Plasma processing tools, dual-source plasma etchers, dual-source plasma etching methods, and methods of forming planar coil dual-source plasma etchers

Apparatus for improving the performance of a temperature-sensitive etch process

In situ etch process for insulating and conductive materials

Method for enhancing oxide to nitride selectivity through the use of independent heat control

Process for improving the performance of a temperature-sensitive etch process

In situ etch process for insulating and conductive materials

Integrated circuit fabrication process to reduce critical dimension loss during etching

Stacked-trench dram cell that eliminates the problem of phosphorus diffusion into access transistor channel regions

Waveguide for thermo optic device

Waveguide for thermo optic device

Dilute cleaning composition and method for using the same

MICRON SEMICONDUCTOR INC

Method to slope conductor profile prior to dielectric deposition to improve dielectric step-coverage

Use of a faceted etch process to eliminate stringers

High accuracy via formation for semiconductor devices

Use of a clean up step to form more vertical profiles of polycrystalline silicon sidewalls during the manufacture of a semiconductor device

Method of conductor isolation from a conductive contact plug

SANDHU GURTEJ SINGH

Resonator for thermo optic device

Resonator for thermo optic device