Inventor
YAMAOKA TOMONORI
JP20 patents
⚠️ This page may combine multiple inventors who share the name “YAMAOKA TOMONORI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
MITSUBISHI MATERIAL SILICON
4 patentsUS7033843B2Apr 25, 2006
Semiconductor manufacturing method and semiconductor manufacturing apparatus
MITSUBISHI MATERIAL SILICON22 citations92
US6491758B1Dec 10, 2002
CVD apparatus equipped with moisture monitoring
MITSUBISHI MATERIAL SILICON11 citations73
US6776805B2Aug 17, 2004
Semiconductor manufacturing apparatus having a moisture measuring device
MITSUBISHI MATERIAL SILICON2 citations62
US6794204B2Sep 21, 2004
Semiconductor manufacturing method and semiconductor manufacturing apparatus
MITSUBISHI MATERIAL SILICON0 citations51
DENSO CORP
3 patentsUS7811907B2Oct 12, 2010
Method for manufacturing semiconductor device and epitaxial growth equipment
DENSO CORP14 citations83
US7642178B2Jan 5, 2010
Semiconductor device, method for manufacturing the same and method for evaluating the same
DENSO CORP13 citations83
US7601603B2Oct 13, 2009
Method for manufacturing semiconductor device
DENSO CORP10 citations83