P

Inventor

KIMURA YASUHIRO

JP45 patents
⚠️ This page may combine multiple inventors who share the name “KIMURA YASUHIRO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

MITSUBISHI ELECTRIC CORP

12 patents
US6232201B1May 15, 2001

Semiconductor substrate processing method

MITSUBISHI ELECTRIC CORP24 citations92
US5876819AMar 2, 1999

Crystal orientation detectable semiconductor substrate, and methods of manufacturing and using the same

MITSUBISHI ELECTRIC CORP32 citations90
US5946543AAug 31, 1999

Semiconductor wafer evaluating method and semiconductor device manufacturing method

MITSUBISHI ELECTRIC CORP24 citations85
US10559508B2Feb 11, 2020

Method for manufacturing SiC substrate

MITSUBISHI ELECTRIC CORP2 citations73
US6563172B2May 13, 2003

Semiconductor substrate processing method

MITSUBISHI ELECTRIC CORP12 citations73
US5928786AJul 27, 1999

Monocrystalline silicon wafer and method of thermally oxidizing a surface thereof

MITSUBISHI ELECTRIC CORP7 citations73
US10858757B2Dec 8, 2020

Silicon carbide epitaxial substrate and silicon carbide semiconductor device

MITSUBISHI ELECTRIC CORP2 citations72
US10964785B2Mar 30, 2021

SiC epitaxial wafer and manufacturing method of the same

MITSUBISHI ELECTRIC CORP0 citations62
US10707075B2Jul 7, 2020

Semiconductor wafer, semiconductor device, and method for producing semiconductor device

MITSUBISHI ELECTRIC CORP1 citations61
US10950435B2Mar 16, 2021

SiC epitaxial wafer, method for manufacturing SiC epitaxial wafer, SiC device, and power conversion apparatus

MITSUBISHI ELECTRIC CORP1 citations60
US6461447B1Oct 8, 2002

Substrate for epitaxial growth

MITSUBISHI ELECTRIC CORP2 citations60
US9564315B1Feb 7, 2017

Manufacturing method and apparatus for manufacturing silicon carbide epitaxial wafer

MITSUBISHI ELECTRIC CORP1 citations50

TOSHIBA KK

9 patents

IBM

6 patents

RENESAS TECH CORP

3 patents

AJINOMOTO KK

2 patents

NOF CORP

2 patents

(unassigned)

1 patent

MATSUSHITA ELECTRIC WORKS LTD

1 patent

RENESAS ELECTRONICS CORP

1 patent

UYEHARA NORIOKI

1 patent

NIPPON SOKEN

1 patent

KENRICH PETROCHEMICALS

1 patent

AJINOMTO CO INC

1 patent

ULVAC INC

1 patent

FUKUTOMI KAZUHIRO

1 patent

FUJITSU LTD

1 patent

YAMAZAKI HAJIME

1 patent