Inventor
KUO CHING-SEN
TW35 patents
⚠️ This page may combine multiple inventors who share the name “KUO CHING-SEN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TAIWAN SEMICONDUCTOR MFG CO LTD
25 patentsUS10121811B1Nov 6, 2018
Method of high-aspect ratio pattern formation with submicron pixel pitch
TAIWAN SEMICONDUCTOR MFG CO LTD12 citations83
US10090357B2Oct 2, 2018
Method of using a surfactant-containing shrinkage material to prevent photoresist pattern collapse caused by capillary forces
TAIWAN SEMICONDUCTOR MFG CO LTD5 citations83
US10510587B2Dec 17, 2019
Method for manufacturing semiconductor device
TAIWAN SEMICONDUCTOR MFG CO LTD3 citations73
US11049767B2Jun 29, 2021
Semiconductor device and methods of manufacturing thereof
TAIWAN SEMICONDUCTOR MFG CO LTD4 citations72
US10734436B2Aug 4, 2020
Method of using a surfactant-containing shrinkage material to prevent photoresist pattern collapse caused by capillary forces
TAIWAN SEMICONDUCTOR MFG CO LTD3 citations72
US10546889B2Jan 28, 2020
Method of high-aspect ratio pattern formation with submicron pixel pitch
TAIWAN SEMICONDUCTOR MFG CO LTD5 citations72
US10186542B1Jan 22, 2019
Patterning for substrate fabrication
TAIWAN SEMICONDUCTOR MFG CO LTD3 citations72
US9917006B1Mar 13, 2018
Method of planarizating film
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations72
US11769662B2Sep 26, 2023
Method for reducing charging of semiconductor wafers
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations71
US12532561B2Jan 20, 2026
Image sensor device and manufacturing method thereof
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11996432B2May 28, 2024
Image sensor device and manufacturing method thereof
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11086221B2Aug 10, 2021
Method of using a surfactant-containing shrinkage material to prevent photoresist pattern collapse caused by capillary forces
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US10910260B2Feb 2, 2021
Method for manufacturing semiconductor device
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US12456649B2Oct 28, 2025
Semiconductor device and methods of manufacturing thereof
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US12293940B2May 6, 2025
Techniques for forming a deep trench isolation structure between photodiodes by forming a first set of trenches based on a first pattern and forming a second set of trenches based on a second pattern
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US12165867B2Dec 10, 2024
Method for reducing charging of semiconductor wafers
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations61
US12100592B2Sep 24, 2024
Implantation mask formation
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US11665897B2May 30, 2023
Improving surface topography by forming spacer-like components
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US11658031B2May 23, 2023
Implantation mask formation
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations61
US11276699B2Mar 15, 2022
Surface topography by forming spacer-like components
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US10943783B2Mar 9, 2021
Method for manufacturing a semiconductor device
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations60
US11411033B2Aug 9, 2022
Image sensor device and manufacturing method thereof
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations52
US10522557B2Dec 31, 2019
Surface topography by forming spacer-like components
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations51
US10366916B2Jul 30, 2019
Integrated circuit structure with guard ring
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations51
US9437650B2Sep 6, 2016
Image device and methods of forming the same
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations48
TAIWAN SEMICONDUCTOR MFG
7 patentsUS6645851B1Nov 11, 2003
Method of forming planarized coatings on contact hole patterns of various duty ratios
TAIWAN SEMICONDUCTOR MFG98 citations96
US6803291B1Oct 12, 2004
Method to preserve alignment mark optical integrity
TAIWAN SEMICONDUCTOR MFG32 citations89
US6632590B1Oct 14, 2003
Enhance the process window of memory cell line/space dense pattern in sub-wavelength process
TAIWAN SEMICONDUCTOR MFG8 citations70
US7189957B2Mar 13, 2007
Methods to improve photonic performances of photo-sensitive integrated circuits
TAIWAN SEMICONDUCTOR MFG6 citations63
USRE41697ESep 14, 2010
Method of forming planarized coatings on contact hole patterns of various duty ratios
TAIWAN SEMICONDUCTOR MFG4 citations61
US8809172B2Aug 19, 2014
Self-aligned patterning for deep implantation in a semiconductor structure
TAIWAN SEMICONDUCTOR MFG3 citations60
US7101758B2Sep 5, 2006
Poly-etching method for split gate flash memory cell
TAIWAN SEMICONDUCTOR MFG0 citations39