Inventor

KAMATA TADASHI

JP2 patents

⚠️ This page may combine multiple inventors who share the name “KAMATA TADASHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

KAMATA TADASHI

1 patent

US5244820ASep 14, 1993

Semiconductor integrated circuit device, method for producing the same, and ion implanter for use in the method

KAMATA TADASHI113 citations94

HITACHI LTD

1 patent

US5134301AJul 28, 1992

Ion implanting apparatus, having ion contacting surfaces made of high purity silicon, for fabricating semiconductor integrated circuit devices

HITACHI LTD87 citations93