Inventor
CHENG TSUNGNAN
US9 patents
⚠️ This page may combine multiple inventors who share the name “CHENG TSUNGNAN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
4 patentsUS5795215AAug 18, 1998
Method and apparatus for using a retaining ring to control the edge effect
APPLIED MATERIALS INC243 citations98
US6019670AFeb 1, 2000
Method and apparatus for conditioning a polishing pad in a chemical mechanical polishing system
APPLIED MATERIALS INC138 citations95
US6280297B1Aug 28, 2001
Apparatus and method for distribution of slurry in a chemical mechanical polishing system
APPLIED MATERIALS INC24 citations92
US6051499AApr 18, 2000
Apparatus and method for distribution of slurry in a chemical mechanical polishing system
APPLIED MATERIALS INC28 citations92
DOW CHEMICAL CO
2 patentsUS5163977ANov 17, 1992
Semi-permeable gas separation membranes containing non-ionic surfactants possessing improved resistance to thermal compaction and processes for making and using the same
DOW CHEMICAL CO26 citations92
US5141530AAug 25, 1992
Polycarbonate, polyester, and polyestercarbonate semi-permeable gas separation membranes possessing improved gas selectivity and recovery, and processes for making and using the same
DOW CHEMICAL CO18 citations73