Inventor
MIZOUCHI SATORU
JP14 patents
⚠️ This page may combine multiple inventors who share the name “MIZOUCHI SATORU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
CANON KK
13 patentsUS6259512B1Jul 10, 2001
Illumination system and exposure apparatus having the same
CANON KK188 citations98
US5963305AOct 5, 1999
Illumination system and exposure apparatus
CANON KK89 citations95
US6738129B2May 18, 2004
Illumination apparatus, exposure apparatus, and device fabricating method using the same
CANON KK24 citations92
US5991088ANov 23, 1999
Illumination system and exposure apparatus
CANON KK20 citations92
US5940214AAug 17, 1999
Optical arrangement with diffractive optical element
CANON KK20 citations92
US5926257AJul 20, 1999
Illumination optical system and exposure apparatus having the same
CANON KK45 citations92
US5905597AMay 18, 1999
Optical apparatus
CANON KK34 citations92
US5790902AAug 4, 1998
Zoom lens
CANON KK22 citations92
US5717413AFeb 10, 1998
Control device for display device
CANON KK27 citations92
US6614597B2Sep 2, 2003
Illumination apparatus and projection exposure apparatus
CANON KK13 citations83
US6819493B2Nov 16, 2004
Illumination apparatus with light shielding near an exit plane of an optical pipe and projection exposure apparatus using same
CANON KK6 citations73
US5946138AAug 31, 1999
Illumination optical system, exposure device and device manufacturing method
CANON KK15 citations73
US6798577B2Sep 28, 2004
Illumination apparatus with light shielding near an exit plane of an optical pipe and projection exposure apparatus using same
CANON KK3 citations62