Inventor
ASANUMA KEITA
JP6 patents
Patents
6 patentsUS6288556B1Sep 11, 2001
Method of electrical measurement of misregistration of patterns
TOSHIBA KK26 citations92
US6842230B2Jan 11, 2005
Exposing method
TOSHIBA KK13 citations82
US6008880ADec 28, 1999
Exposure tool and method capable of correcting high (N-TH) order light exposure errors depending upon an interfield coordinate
TOSHIBA KK18 citations82
US7440104B2Oct 21, 2008
Exposure system, test mask for monitoring polarization, and method for monitoring polarization
TOSHIBA KK3 citations62
US7164960B2Jan 16, 2007
Apparatus for correcting a plurality of exposure tools, method for correcting a plurality of exposure tools, and method for manufacturing semiconductor device
TOSHIBA KK4 citations61
US6872508B2Mar 29, 2005
Exposure method and method of manufacturing semiconductor device
TOSHIBA KK0 citations51