Inventor
VOGLER KLAUS WOLFGANG
DE20 patents
Patents
20 patentsUS6603788B1Aug 5, 2003
Resonator for single line selection
LAMBDA PHYSIK AG22 citations92
US6526085B2Feb 25, 2003
Performance control system and method for gas discharge lasers
LAMBDA PHYSIK AG25 citations92
US6504861B2Jan 7, 2003
Laser gas replenishment method
LAMBDA PHYSIK AG24 citations92
US6493370B2Dec 10, 2002
Laser gas replenishment method
LAMBDA PHYSIK AG16 citations92
US6490308B2Dec 3, 2002
Laser gas replenishment method
LAMBDA PHYSIK AG27 citations92
US6389052B2May 14, 2002
Laser gas replenishment method
LAMBDA PHYSIK AG32 citations92
US6327290B1Dec 4, 2001
Beam delivery system for molecular fluorine (F2) laser
LAMBDA PHYSIK AG27 citations92
US6285701B1Sep 4, 2001
Laser resonator for improving narrow band emission of an excimer laser
LAMBDA PHYSIK AG33 citations92
US6212214B1Apr 3, 2001
Performance control system and method for gas discharge lasers
LAMBDA PHYSIK AG46 citations92
US6834069B1Dec 21, 2004
Molecular fluorine laser with intracavity polarization enhancer
LAMBDA PHYSIK AG36 citations91
US6330267B1Dec 11, 2001
Performance control system and method for gas discharge lasers
LAMBDA PHYSIK AG16 citations84
US6678291B2Jan 13, 2004
Molecular fluorine laser
LAMBDA PHYSIK AG7 citations74
US6577665B2Jun 10, 2003
Molecular fluorine laser
LAMBDA PHYSIK AG8 citations74
US6965624B2Nov 15, 2005
Laser gas replenishment method
LAMBDA PHYSIK AG7 citations73
US6738406B2May 18, 2004
Precision measurement of wavelengths emitted by a molecular fluorine laser at 157nm
LAMBDA PHYSIK AG10 citations73
US6490305B2Dec 3, 2002
Beam delivery system for molecular fluorine (F2) laser
LAMBDA PHYSIK AG7 citations73
US6487229B2Nov 26, 2002
Beam delivery system for molecular fluorine (F2) laser
LAMBDA PHYSIK AG9 citations73
US7266137B2Sep 4, 2007
Laser gas replenishment method
LAMBDA PHYSIK AG5 citations62
US7006541B2Feb 28, 2006
Absolute wavelength calibration of lithography laser using multiple element or tandem see through hollow cathode lamp
LAMBDA PHYSIK AG1 citations52
US6690703B1Feb 10, 2004
Molecular fluorine laser system
LAMBDA PHYSIK AG1 citations51