Inventor
PAETZEL RAINER
DE14 patents
⚠️ This page may combine multiple inventors who share the name “PAETZEL RAINER”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
LAMBDA PHYSIK AG
11 patentsUS7227881B2Jun 5, 2007
Master oscillator—power amplifier excimer laser system
LAMBDA PHYSIK AG25 citations92
US6327290B1Dec 4, 2001
Beam delivery system for molecular fluorine (F2) laser
LAMBDA PHYSIK AG27 citations92
US7184204B2Feb 27, 2007
Master-oscillator power-amplifier (MOPA) excimer or molecular fluorine laser system with long optics lifetime
LAMBDA PHYSIK AG25 citations90
US7158553B2Jan 2, 2007
Master oscillator/power amplifier excimer laser system with pulse energy and pointing control
LAMBDA PHYSIK AG12 citations83
US6987790B2Jan 17, 2006
Excimer or molecular fluorine laser with several discharge chambers
LAMBDA PHYSIK AG11 citations80
US7164703B2Jan 16, 2007
Temperature control systems for excimer lasers
LAMBDA PHYSIK AG9 citations73
US6490305B2Dec 3, 2002
Beam delivery system for molecular fluorine (F2) laser
LAMBDA PHYSIK AG7 citations73
US6487229B2Nov 26, 2002
Beam delivery system for molecular fluorine (F2) laser
LAMBDA PHYSIK AG9 citations73
US7308013B2Dec 11, 2007
Excimer or molecular fluorine laser system with precision timing
LAMBDA PHYSIK AG6 citations61
US6763048B2Jul 13, 2004
Line narrowing of molecular fluorine laser emission
LAMBDA PHYSIK AG1 citations51
US7245420B2Jul 17, 2007
Master-oscillator power-amplifier (MOPA) excimer or molecular fluorine laser system with long optics lifetime
LAMBDA PHYSIK AG1 citations50