Inventor

UCHIKURA KAZUHITO

JP4 patents

⚠️ This page may combine multiple inventors who share the name “UCHIKURA KAZUHITO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

JSR CORP

1 patent

US6579153B2Jun 17, 2003

Aqueous dispersion for chemical mechanical polishing and chemical mechanical polishing process

JSR CORP101 citations97

TOSHIBA KK

1 patent

US6935928B2Aug 30, 2005

Chemical mechanical polishing aqueous dispersion and chemical mechanical polishing method

TOSHIBA KK24 citations92

SHIDA HIROTAKA

1 patent

US8506359B2Aug 13, 2013

Aqueous dispersion for chemical mechanical polishing and chemical mechanical polishing method

SHIDA HIROTAKA5 citations66

KUNITANI EIICHIROU

1 patent

US8470195B2Jun 25, 2013

Chemical mechanical polishing aqueous dispersion preparation set, method of preparing chemical mechanical polishing aqueous dispersion, chemical mechanical polishing aqueous dispersion, and chemical mechanical polishing method

KUNITANI EIICHIROU4 citations56