Inventor
TOGOE KENICHIRO
JP5 patents
Patents
5 patentsUS6771483B2Aug 3, 2004
Electrostatic chuck member and method of producing the same
TOCALO CO LTD56 citations94
US7767268B2Aug 3, 2010
Spray-coated member having an excellent resistance to plasma erosion and method of producing the same
TOCALO CO LTD8 citations79
US8053058B2Nov 8, 2011
Spray-coated member having an excellent resistance to plasma erosion and method of producing the same
TOCALO CO LTD2 citations58
US9421570B2Aug 23, 2016
Method for forming fluoride spray coating and fluoride spray coating covered member
TOCALO CO LTD0 citations50
US9238863B2Jan 19, 2016
Method for blackening white fluoride spray coating, and fluoride spray coating covered member having a blackened layer on its surface
TOCALO CO LTD0 citations49