Inventor
BEHIN BEHRANG
US21 patents
⚠️ This page may combine multiple inventors who share the name “BEHIN BEHRANG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ANALOG DEVICES INC
6 patentsUS6744173B2Jun 1, 2004
Multi-layer, self-aligned vertical combdrive electrostatic actuators and fabrication methods
ANALOG DEVICES INC92 citations97
US6819822B2Nov 16, 2004
Two-dimensional gimbaled scanning actuator with vertical electrostatic comb-drive for actuation and/or sensing
ANALOG DEVICES INC55 citations95
US6887391B1May 3, 2005
Fabrication and controlled release of structures using etch-stop trenches
ANALOG DEVICES INC34 citations92
US7183633B2Feb 27, 2007
Optical cross-connect system
ANALOG DEVICES INC47 citations90
US6888979B2May 3, 2005
MEMS mirrors with precision clamping mechanism
ANALOG DEVICES INC6 citations74
US7023604B2Apr 4, 2006
Three dimensional optical switches and beam steering modules
ANALOG DEVICES INC6 citations62
ONIX MICROSYSTEMS INC
6 patentsUS6593677B2Jul 15, 2003
Biased rotatable combdrive devices and methods
ONIX MICROSYSTEMS INC95 citations97
US6764936B2Jul 20, 2004
Mechanical landing pad formed on the underside of a MEMS device
ONIX MICROSYSTEMS INC24 citations92
US6629461B2Oct 7, 2003
Biased rotatable combdrive actuator methods
ONIX MICROSYSTEMS INC34 citations92
US6473544B1Oct 29, 2002
Optical switch having equalized beam spreading in all connections
ONIX MICROSYSTEMS INC19 citations92
US6586841B1Jul 1, 2003
Mechanical landing pad formed on the underside of a MEMS device
ONIX MICROSYSTEMS INC7 citations73
US6480319B2Nov 12, 2002
Apparatus and method for 2-dimensional steered-beam NxM optical switch using single-axis mirror arrays
ONIX MICROSYSTEMS INC10 citations73
ONIX MICROSYSTEMS
4 patentsUS6330102B1Dec 11, 2001
Apparatus and method for 2-dimensional steered-beam NxM optical switch using single-axis mirror arrays and relay optics
ONIX MICROSYSTEMS108 citations98
US6612029B2Sep 2, 2003
Multi-layer, self-aligned vertical combdrive electrostatic actuators and fabrication methods
ONIX MICROSYSTEMS66 citations95
US6528887B2Mar 4, 2003
Conductive equipotential landing pads formed on the underside of a MEMS device
ONIX MICROSYSTEMS50 citations95
US6437902B2Aug 20, 2002
Optical beam steering switching system
ONIX MICROSYSTEMS15 citations92
UNIV CALIFORNIA
3 patentsUS6962830B1Nov 8, 2005
Global mechanical stop
UNIV CALIFORNIA5 citations74
US7301177B2Nov 27, 2007
Method for directing an optical beam and a method for manufacturing an apparatus for directing an optical beam
UNIV CALIFORNIA1 citations63
US6897539B2May 24, 2005
Method for directing an optical beam and a method for manufacturing an apparatus for directing an optical beam
UNIV CALIFORNIA3 citations63