Inventor
DANEMAN MICHAEL J
US26 patents
⚠️ This page may combine multiple inventors who share the name “DANEMAN MICHAEL J”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
INVENSENSE INC
10 patentsUS8564076B1Oct 22, 2013
Internal electrical contact for enclosed MEMS devices
INVENSENSE INC40 citations98
US9114977B2Aug 25, 2015
MEMS device and process for RF and low resistance applications
INVENSENSE INC12 citations92
US8384134B2Feb 26, 2013
MEMS device including an electrical interconnect through a substrate
INVENSENSE INC11 citations84
US9511994B2Dec 6, 2016
Aluminum nitride (AlN) devices with infrared absorption structural layer
INVENSENSE INC5 citations73
US10683205B2Jun 16, 2020
Release chemical protection for integrated complementary metal-oxide-semiconductor (CMOS) and micro-electro-mechanical (MEMS) devices
INVENSENSE INC0 citations52
US10508022B2Dec 17, 2019
MEMS device and process for RF and low resistance applications
INVENSENSE INC0 citations52
US10294097B2May 21, 2019
Aluminum nitride (AlN) devices with infrared absorption structural layer
INVENSENSE INC0 citations52
US10160635B2Dec 25, 2018
MEMS device and process for RF and low resistance applications
INVENSENSE INC0 citations52
US10071906B2Sep 11, 2018
Release chemical protection for integrated complementary metal-oxide-semiconductor (CMOS) and micro-electro-mechanical (MEMS) devices
INVENSENSE INC0 citations52
US9487396B2Nov 8, 2016
Release chemical protection for integrated complementary metal-oxide-semiconductor (CMOS) and micro-electro-mechanical (MEMS) devices
INVENSENSE INC0 citations52
ANALOG DEVICES INC
7 patentsUS6819822B2Nov 16, 2004
Two-dimensional gimbaled scanning actuator with vertical electrostatic comb-drive for actuation and/or sensing
ANALOG DEVICES INC55 citations95
US6887391B1May 3, 2005
Fabrication and controlled release of structures using etch-stop trenches
ANALOG DEVICES INC34 citations92
US6819820B1Nov 16, 2004
Use of applied force to improve MEMS switch performance
ANALOG DEVICES INC15 citations92
US7183633B2Feb 27, 2007
Optical cross-connect system
ANALOG DEVICES INC47 citations90
US6888979B2May 3, 2005
MEMS mirrors with precision clamping mechanism
ANALOG DEVICES INC6 citations74
US6873756B2Mar 29, 2005
Tiling of optical MEMS devices
ANALOG DEVICES INC4 citations63
US7023604B2Apr 4, 2006
Three dimensional optical switches and beam steering modules
ANALOG DEVICES INC6 citations62
ONIX MICROSYSTEMS INC
4 patentsUS6764936B2Jul 20, 2004
Mechanical landing pad formed on the underside of a MEMS device
ONIX MICROSYSTEMS INC24 citations92
US6514781B2Feb 4, 2003
Maintaining the state of a MEMS device in the event of a power failure
ONIX MICROSYSTEMS INC18 citations80
US6586841B1Jul 1, 2003
Mechanical landing pad formed on the underside of a MEMS device
ONIX MICROSYSTEMS INC7 citations73
US6480319B2Nov 12, 2002
Apparatus and method for 2-dimensional steered-beam NxM optical switch using single-axis mirror arrays
ONIX MICROSYSTEMS INC10 citations73
ONIX MICROSYSTEMS
3 patentsUS6330102B1Dec 11, 2001
Apparatus and method for 2-dimensional steered-beam NxM optical switch using single-axis mirror arrays and relay optics
ONIX MICROSYSTEMS108 citations98
US6528887B2Mar 4, 2003
Conductive equipotential landing pads formed on the underside of a MEMS device
ONIX MICROSYSTEMS50 citations95
US6437902B2Aug 20, 2002
Optical beam steering switching system
ONIX MICROSYSTEMS15 citations92