Inventor
WIBERG DEAN V
US6 patents
⚠️ This page may combine multiple inventors who share the name “WIBERG DEAN V”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
CALIFORNIA INST OF TECHN
3 patentsUS6944931B2Sep 20, 2005
Method of producing an integral resonator sensor and case
CALIFORNIA INST OF TECHN79 citations96
US6777312B2Aug 17, 2004
Wafer-level transfer of membranes in semiconductor processing
CALIFORNIA INST OF TECHN9 citations71
US7396478B2Jul 8, 2008
Multiple internal seal ring micro-electro-mechanical system vacuum packaging method
CALIFORNIA INST OF TECHN2 citations61