Inventor
BEER EMANUEL
US24 patents
⚠️ This page may combine multiple inventors who share the name “BEER EMANUEL”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
17 patentsUS8033772B2Oct 11, 2011
Transfer chamber for vacuum processing system
APPLIED MATERIALS INC15 citations93
US7018517B2Mar 28, 2006
Transfer chamber for vacuum processing system
APPLIED MATERIALS INC39 citations93
US6897411B2May 24, 2005
Heated substrate support
APPLIED MATERIALS INC19 citations92
US6847730B1Jan 25, 2005
Automated substrate processing system
APPLIED MATERIALS INC23 citations92
US6833717B1Dec 21, 2004
Electron beam test system with integrated substrate transfer module
APPLIED MATERIALS INC35 citations92
US7319335B2Jan 15, 2008
Configurable prober for TFT LCD array testing
APPLIED MATERIALS INC38 citations90
US7499767B2Mar 3, 2009
Methods and apparatus for positioning a substrate relative to a support stage
APPLIED MATERIALS INC10 citations84
US7469715B2Dec 30, 2008
Chamber isolation valve RF grounding
APPLIED MATERIALS INC12 citations83
US7355418B2Apr 8, 2008
Configurable prober for TFT LCD array test
APPLIED MATERIALS INC14 citations83
US7007919B2Mar 7, 2006
Slit valve method and apparatus
APPLIED MATERIALS INC13 citations81
US7151981B2Dec 19, 2006
Methods and apparatus for positioning a substrate relative to a support stage
APPLIED MATERIALS INC10 citations74
US7919972B2Apr 5, 2011
Integrated substrate transfer module
APPLIED MATERIALS INC5 citations73
US7330021B2Feb 12, 2008
Integrated substrate transfer module
APPLIED MATERIALS INC6 citations73
US7372250B2May 13, 2008
Methods and apparatus for determining a position of a substrate relative to a support stage
APPLIED MATERIALS INC7 citations72
US6554907B2Apr 29, 2003
Susceptor with internal support
APPLIED MATERIALS INC7 citations71
US7847566B2Dec 7, 2010
Configurable prober for TFT LCD array test
APPLIED MATERIALS INC0 citations50
US7208047B2Apr 24, 2007
Apparatus and method for thermally isolating a heat chamber
APPLIED MATERIALS INC1 citations42
APPLIED KOMATSU TECHNOLOGY INC
6 patentsUS6182603B1Feb 6, 2001
Surface-treated shower head for use in a substrate processing chamber
APPLIED KOMATSU TECHNOLOGY INC692 citations99
US6215897B1Apr 10, 2001
Automated substrate processing system
APPLIED KOMATSU TECHNOLOGY INC87 citations98
US6647993B2Nov 18, 2003
Surface-treated shower head for use in a substrate processing chamber
APPLIED KOMATSU TECHNOLOGY INC48 citations96
US6371712B1Apr 16, 2002
Support frame for substrates
APPLIED KOMATSU TECHNOLOGY INC38 citations92
US6149365ANov 21, 2000
Support frame for substrates
APPLIED KOMATSU TECHNOLOGY INC37 citations92
US6225601B1May 1, 2001
Heating a substrate support in a substrate handling chamber
APPLIED KOMATSU TECHNOLOGY INC12 citations67