Inventor
SHIOTA YUUKI
JP5 patents
Patents
5 patentsUS7115341B2Oct 3, 2006
Halftone phase shift mask blank, halftone phase shift mask, and method of producing the same
HOYA CORP14 citations83
US7862963B2Jan 4, 2011
Halftone type phase shift mask blank and phase shift mask thereof
HOYA CORP3 citations61
US7592106B2Sep 22, 2009
Halftone type phase shift mask blank and phase shift mask thereof
HOYA CORP4 citations61
US7169513B2Jan 30, 2007
Halftone type phase shift mask blank and phase shift mask thereof
HOYA CORP3 citations61
US7632612B2Dec 15, 2009
Halftone phase shift mask blank, halftone phase shift mask, and method of producing the same
HOYA CORP1 citations51