Inventor
GOMBAR-FETNER SHEILA
US2 patents
Patents
2 patentsUS7115531B2Oct 3, 2006
Organosilicate resins as hardmasks for organic polymer dielectrics in fabrication of microelectronic devices
DOW GLOBAL TECHNOLOGIES INC35 citations90
US7268200B2Sep 11, 2007
Organosilicate resins as hardmasks for organic polymer dielectrics in fabrication of microelectronic devices
DOW GLOBAL TECHNOLOGIES INC8 citations70