Inventor
WIRTH PAUL Z
US22 patents
⚠️ This page may combine multiple inventors who share the name “WIRTH PAUL Z”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
13 patentsUS11117265B2Sep 14, 2021
Robot for simultaneous substrate transfer
APPLIED MATERIALS INC9 citations86
US11107709B2Aug 31, 2021
Temperature-controllable process chambers, electronic device processing systems, and manufacturing methods
APPLIED MATERIALS INC5 citations83
US10498948B1Dec 3, 2019
Methods and apparatus for absolute and relative depth measurements using camera focus distance
APPLIED MATERIALS INC10 citations80
US11415230B2Aug 16, 2022
Slit valve pneumatic control
APPLIED MATERIALS INC6 citations74
US11590662B2Feb 28, 2023
Robot for simultaneous substrate transfer
APPLIED MATERIALS INC2 citations73
US11837478B2Dec 5, 2023
Temperature-controllable process chambers, electronic device processing systems, and manufacturing methods
APPLIED MATERIALS INC2 citations72
US9799544B2Oct 24, 2017
Robot assemblies, substrate processing apparatus, and methods for transporting substrates in electronic device manufacturing
APPLIED MATERIALS INC3 citations72
US11582378B2Feb 14, 2023
Methods and apparatus for absolute and relative depth measurements using camera focus distance
APPLIED MATERIALS INC2 citations69
US11032464B2Jun 8, 2021
Methods and apparatus for absolute and relative depth measurements using camera focus distance
APPLIED MATERIALS INC0 citations59
USD938373SDec 14, 2021
Substrate transfer structure
APPLIED MATERIALS INC0 citations58
US10453725B2Oct 22, 2019
Dual-blade robot including vertically offset horizontally overlapping frog-leg linkages and systems and methods including same
APPLIED MATERIALS INC0 citations51
US11791172B2Oct 17, 2023
Methods of controlling gas pressure in gas-pulsing-based precursor distribution systems
APPLIED MATERIALS INC0 citations48
US12130606B2Oct 29, 2024
Disturbance compensation for substrate processing recipes
APPLIED MATERIALS INC0 citations41
SEMITOOL INC
9 patentsUS6680253B2Jan 20, 2004
Apparatus for processing a workpiece
SEMITOOL INC31 citations92
US6548411B2Apr 15, 2003
Apparatus and methods for processing a workpiece
SEMITOOL INC37 citations92
US6492284B2Dec 10, 2002
Reactor for processing a workpiece using sonic energy
SEMITOOL INC19 citations92
US6930046B2Aug 16, 2005
Single workpiece processing system
SEMITOOL INC20 citations88
US6511914B2Jan 28, 2003
Reactor for processing a workpiece using sonic energy
SEMITOOL INC13 citations84
US6969682B2Nov 29, 2005
Single workpiece processing system
SEMITOOL INC13 citations81
US6806194B2Oct 19, 2004
Apparatus and methods for processing a workpiece
SEMITOOL INC7 citations73
US7934898B2May 3, 2011
High throughput semiconductor wafer processing
SEMITOOL INC4 citations62
US7337663B2Mar 4, 2008
Sonic energy process chamber
SEMITOOL INC4 citations60