Inventor

SCRANTON DANA R

US3 patents

Patents

3 patents

US6900132B2May 31, 2005

Single workpiece processing system

SEMITOOL INC22 citations88

US7337663B2Mar 4, 2008

Sonic energy process chamber

SEMITOOL INC4 citations60

US6869486B2Mar 22, 2005

Methods for removing metallic contamination from wafer containers

SEMITOOL INC1 citations41