Inventor
AEGERTER BRIAN
US10 patents
⚠️ This page may combine multiple inventors who share the name “AEGERTER BRIAN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SEMITOOL INC
9 patentsUS6423642B1Jul 23, 2002
Reactor for processing a semiconductor wafer
SEMITOOL INC78 citations96
US6413436B1Jul 2, 2002
Selective treatment of the surface of a microelectronic workpiece
SEMITOOL INC61 citations95
US7102763B2Sep 5, 2006
Methods and apparatus for processing microelectronic workpieces using metrology
SEMITOOL INC22 citations92
US6794291B2Sep 21, 2004
Reactor for processing a semiconductor wafer
SEMITOOL INC13 citations92
US6900132B2May 31, 2005
Single workpiece processing system
SEMITOOL INC22 citations88
US6774056B2Aug 10, 2004
Sonic immersion process system and methods
SEMITOOL INC15 citations77
US6692613B2Feb 17, 2004
Reactor for processing a semiconductor wafer
SEMITOOL INC11 citations73
US6447633B1Sep 10, 2002
Reactor for processing a semiconductor wafer
SEMITOOL INC10 citations73
US7337663B2Mar 4, 2008
Sonic energy process chamber
SEMITOOL INC4 citations60