Inventor
CHIKARMANE VINAY B
US9 patents
⚠️ This page may combine multiple inventors who share the name “CHIKARMANE VINAY B”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
INTEL CORP
7 patentsUS7719062B2May 18, 2010
Tuned tensile stress low resistivity slot contact structure for n-type transistor performance enhancement
INTEL CORP33 citations91
US7070687B2Jul 4, 2006
Apparatus and method of surface treatment for electrolytic and electroless plating of metals in integrated circuit manufacturing
INTEL CORP26 citations91
US5804251ASep 8, 1998
Low temperature aluminum alloy plug technology
INTEL CORP19 citations83
US7968952B2Jun 28, 2011
Stressed barrier plug slot contact structure for transistor performance enhancement
INTEL CORP12 citations82
US7001641B2Feb 21, 2006
Seed layer treatment
INTEL CORP4 citations62
US7741219B2Jun 22, 2010
Method for manufacturing a semiconductor device using the self aligned contact (SAC) process flow for semiconductor devices with aluminum metal gates
INTEL CORP1 citations51
US7582558B2Sep 1, 2009
Reducing corrosion in copper damascene processes
INTEL CORP0 citations50