Inventor
CHENG JUING-YI
TW10 patents
⚠️ This page may combine multiple inventors who share the name “CHENG JUING-YI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TAIWAN SEMICONDUCTOR MFG
8 patentsUS6649538B1Nov 18, 2003
Method for plasma treating and plasma nitriding gate oxides
TAIWAN SEMICONDUCTOR MFG139 citations97
US6541382B1Apr 1, 2003
Lining and corner rounding method for shallow trench isolation
TAIWAN SEMICONDUCTOR MFG98 citations97
US6391792B1May 21, 2002
Multi-step chemical mechanical polish (CMP) planarizing method for forming patterned planarized aperture fill layer
TAIWAN SEMICONDUCTOR MFG22 citations92
US6638866B1Oct 28, 2003
Chemical-mechanical polishing (CMP) process for shallow trench isolation
TAIWAN SEMICONDUCTOR MFG20 citations91
US6821868B2Nov 23, 2004
Method of forming nitrogen enriched gate dielectric with low effective oxide thickness
TAIWAN SEMICONDUCTOR MFG33 citations88
US7087528B2Aug 8, 2006
Chemical-mechanical polishing (CMP) process for shallow trench isolation
TAIWAN SEMICONDUCTOR MFG3 citations61
US7087508B2Aug 8, 2006
Method of improving short channel effect and gate oxide reliability by nitrogen plasma treatment before spacer deposition
TAIWAN SEMICONDUCTOR MFG1 citations51
US6743715B1Jun 1, 2004
Dry clean process to improve device gate oxide integrity (GOI) and reliability
TAIWAN SEMICONDUCTOR MFG4 citations49