Inventor
KONDOU NOBUYUKI
JP12 patents
⚠️ This page may combine multiple inventors who share the name “KONDOU NOBUYUKI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
NGK INSULATORS LTD
6 patentsUS7060945B2Jun 13, 2006
Substrate heater and fabrication method for the same
NGK INSULATORS LTD11 citations83
US6855576B2Feb 15, 2005
Method for cleaning a ceramic member for use in a system for producing semiconductors, a cleaning agent and a combination of cleaning agents
NGK INSULATORS LTD12 citations82
US7247818B2Jul 24, 2007
Substrate heating apparatus and manufacturing method for the same
NGK INSULATORS LTD7 citations73
US11223302B2Jan 11, 2022
Electrostatic chuck having an annular outer region covered by an insulating film
NGK INSULATORS LTD2 citations70
US11956863B2Apr 9, 2024
Multi-zone heater
NGK INSULATORS LTD1 citations62
US7211156B2May 1, 2007
Method for cleaning a ceramic member for use in a system for producing semiconductors, a cleaning agent and a combination of cleaning agents
NGK INSULATORS LTD2 citations61